|
초고주파 플라즈마 식각장비(Microwave Plasma Asher)
|
Joongheon Kim |
joongheon.kim@kanc.re.kr |
|
ICP etcher II(양자팹)
|
Woongsun Lim |
woongsun.lim@kanc.re.kr |
|
ICP etcher I(양자팹)
|
Woongsun Lim |
woongsun.lim@kanc.re.kr |
|
RIE II(foundry)
|
Jaewon Choi |
jaewon.choi@kanc.re.kr |
|
Liftoff Wet-Bench(R&D)
|
Myeongjoon Kim |
myeongjoon.kim@kanc.re.kr |
|
Organic Wet-Bench(R&D)
|
Myeongjoon Kim |
myeongjoon.kim@kanc.re.kr |
|
Alkali Wet-Bench(R&D)
|
Myeongjoon Kim |
myeongjoon.kim@kanc.re.kr |
|
Acid Wet-Bench(R&D)
|
Myeongjoon Kim |
myeongjoon.kim@kanc.re.kr |
|
SPM Wet-station(R&D)
|
Myeongjoon Kim |
myeongjoon.kim@kanc.re.kr |
|
Alkali Wet-station(R&D)
|
Myeongjoon Kim |
myeongjoon.kim@kanc.re.kr |
