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About Fab Facility

Nanotechnology Process Development and Nano Device Process Intergration

 

Nano Device Lab

  • Nano R&D Support

    - 2/4" wafer
    - Basic Research
    - Nano Davice
  • Nano Litho / Pattern

    - Class 1. NIST-A
    - -nim patterning
    - Support R&D | Foundry
  • Nano Device Process Intergration

    - 6" Compound Semiconductor
    - Pilot Scale Production
    - Foundry Service
    - Business Oriented
  • Test & Measurement

    - Nano Structure
    - Surfaco Analysis
    - Electrical & Optical Test
  • Equipment Development

    - Localization of Nano Equipment
    - Test of New Equipment
    - Clean room Rent for Industry Users